A chemical analysis technique often used to analyze samples, or features on samples, which are too small for other types of analysis.
EDS identifies the elements present in a sample and determines their relative percentages. Amounts as low as 1/10th of one percent can be detected. EDS is a “Mass Spectroscopy” technique which identifies all the detectable elements present in a sample, rather than only specific elements requested by the analyst as is common in many other chemical analysis techniques. (see Scanning Electron Microscope)